氟氧化釔是一種無機化合物,化學式為YOF。[1]在一般條件下,該化合物是無色固體。[2]
- 在真空中將氟化釔的水合晶體加熱到900 °C,使其分解:
氟氧化釔會形成四方晶系的晶體。它的晶格參數是a = 0.3910 nm,c = 0.5431 nm。根據六方晶系,晶格參數是a = 0.38727 nm,c = 1.897 nm,Z = 6。
穩定氟氧化釔用於等離子體裝備的內壁。[3][4]
- ^ Mann, A. W.; Bevan, D. J. M. The crystal structure of stoichiometric yttrium oxyfluoride, YOF. Acta Crystallographica. 1970, B26 (12): 2129–2131 [16 June 2017]. doi:10.1107/S0567740870005496. (原始內容存檔於2023-05-05).
- ^ Рипан, Р.; Четяну, И. Неорганическая химия. 1992 (俄語).
- ^ Shiba, Yoshinobu. Stable yttrium oxyfluoride used in plasma process chamber. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. January 2017, 35 (2): 021405. Bibcode:2017JVSTA..35b1405S. doi:10.1116/1.4975143.
- ^ Tsunoura, Toru; Yoshida, Katsumi; Yano2, Toyohiko; Kishi, Yukio. Fabrication, characterization, and fluorine-plasma exposure behavior of dense yttrium oxyfluoride ceramics. Japanese Journal of Applied Physics. 2 May 2017, 56 (6S2): 06HC02. Bibcode:2017JaJAP..56fHC02T. doi:10.7567/JJAP.56.06HC02.