白光干涉顯微鏡
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白光干涉顯微鏡（英語：White light Interferenc microscope）是使用光干涉原理來展示物件的內部或表面的顯微鏡。
通過奈米垂直掃描器與干涉物鏡使解析度達到0.1奈米，因此應用於3D高精度量測。[1][2][3][4][5][6][7]
参考文献
[编辑]- ^ Yu. N. Denisyuk. Photographic reconstruction of the optical properties of an object in its own scattered radiation field. Sov. Phys.-Dokl. 1962, 7: 543. Bibcode:1962SPhD....7..543D.
- ^ Yu. N. Denisyuk. On the reproduction of the optical properties of an object by the wave field of its scattered radiation, Pt. I. Opt. Spectrosc. (USSR). 1963, 15: 279.
- ^ Yu. N. Denisyuk. On the reproduction of the optical properties of an object by the wave field of its scattered radiation, Pt. II. Opt. Spectrosc. (USSR). 1965, 18: 152. Bibcode:1965OptSp..18..152D.
- ^ Byung Jin Chang; Rod C. Alferness; Emmett N. Leith. Space-invariant achromatic grating interferometers: theory (TE). Appl. Opt. 1975, 14 (7): 1592–2100. Bibcode:1975ApOpt..14.1592C. PMID 20154876. doi:10.1364/AO.14.001592.
- ^ Emmett N. Leith; Gary J. Swanson. Achromatic interferometers for white light optical processing and holography. Appl. Opt. 1980, 19 (4): 638–644. Bibcode:1980ApOpt..19..638L. PMID 20216905. doi:10.1364/AO.19.000638.
- ^ Yih-Shyang Cheng; Emmett N. Leith. Successive Fourier transformation with an achromatic interferometer. Appl. Opt. 1984, 23 (22): 4029. Bibcode:1984ApOpt..23.4029C. PMID 18213270. doi:10.1364/AO.23.004029.
- ^ Emmett N. Leith; Robert R. Hershey. STransfer functions and spatial filtering in grating interferometers. Appl. Opt. 1985, 24 (2): 237. Bibcode:1985ApOpt..24..237L. PMID 18216933. doi:10.1364/AO.24.000237.
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